[17a-K101-1~13] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[17a-K101-8] Effects of Flexural Acoustic (ZA) Phonon on the Electron Mobility in Silicon Nanosheet

〇(P)Hikaru Horii¹, Akiko Ueda¹, Yoshihiro Hayashi¹ (1.AIST)

Keywords:

silicon nanosheet,electron-phonon coupling,mobility