[17a-K303-1~11] 8.1 Plasma production and diagnostics

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-K303-6] Velocity distribution analysis of laser-induced fluorescence in the deposition region for neutral Ti particles produced by deep oscillation magnetron sputtering

〇Yuki Nakagawa¹, Hiroki Kobayashi¹, Eisuke Yokoyama¹, Nobuo Nishiniya¹, Masaomi Sanekata¹, Masahide Tona², Hiroaki Yamamoto², Keizo Tsukamoto², Kiyokazu Fuke³, Keijiro Ohshimo⁴, Fuminori Misaizu⁴ (1.Tokyo Polytech. Univ., 2.Ayabo Corp., 3.Kobe Univ., 4.Tohoku Univ.)

Keywords:

laser-induced fluorescence,magnetron sputtering

High power pulsed magnetron sputtering (HPPMS) plasmas contain neutral/ionic particles and those light emitting/non-emitting particles. Various spectroscopic techniques, which are optical emission spectroscopy (OES) for light emitting particles, laser-induced fluorescence (LIF) spectroscopy for light non-emitting particles, laser absorption spectroscopy for light emitting/non-emitting particles, and mass spectrometry for charged particles, are used as the plasma diagnostics for the particles included in HPPMS plasma.
The time-evolution of the LIF shows peaks corresponding to the DOMS discharge of pulse and long tail during the pulse. This is attributed to the velocity distribution of neutral Ti particles generated by pulse discharge of DOMS in the deposition region. The velocity and energy distributions obtained from the time-evolution of LIF can be optimized by the Maxwell distribution. In the present study, we propose a new method for measuring the velocity distribution of neutral particles based on the time-evolution LIF measurement of neutral Ti particles reaching the deposition region in DOMS.