[17a-K308-1~7] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[17a-K308-3] Local structure analysis of amorphous SiO₂ thin films using PDF (Pair Distribution Function) analysis

〇Takanori Itoh¹, Chulho Song¹, Marina Abe¹, Masayuki Inaba¹, Shusaku Ogyu¹, Toshihiro Asada¹ (1.NISSAN ARC, LTD.)

Keywords:

amorphous,structural analysis,pair distribution functions

Functional thin films are currently used in various fields such as electrical and electronic devices, optical functional thin films, and mechanical, physical, and chemical functional films. In particular, amorphous thin films can be found to have unprecedented functions, and are expected to be used in various fields in the future. The performance of amorphous thin films is closely related to the local structure, and evaluating the local structure of thin films is becoming important. However, structural analysis of amorphous thin films has not yet been discovered. In this study, we report the structure of amorphous SiO₂ on a Si substrate, which was discussed locally by PDF (Pair Distribution Functions) analysis using TEM, and the average structure by PDF analysis using grazing incidence (Grazing Incidence: GI) XRD using synchrotron radiation X-rays.