[17a-K403-1~9] 12.7 Biomedical Engineering and Biochips

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-K403-1] Fabrication of CMOS multimodal sensor enabling simultaneous visualization of dissolved oxygen and hydrogen ion distributions

〇(M1)Yuto Ishii¹, Hideo Doi¹, Kenny Gelianto¹, Tomoko Horio¹, Yoshiko Noda¹, Daisuke Akai¹, Ken Hizawa¹, Yong joon Choi¹, Kazuhiro Takahashi¹, Toshihiko Noda¹, Kazuaki Sawada¹ (1.Toyohashi Tech.)

Keywords:

dissolved oxygen,hydrogen ion,simultaneous measurement

In this study, a CMOS multimodal sensor enabling simultaneous visualization of dissolved oxygen (DO) and pH was developed. Using semiconductor lithography, the iridium oxide (IrOx) electrode functioning as DO-sensitive membrane was patterned in a grid on a potentiometric array sensor deposited with titanium nitride (TiN). Based on the simultaneous measurement for DO and pH, the distribution of DO and pH changes was successfully visualized, demonstrating a multimodal sensing on the fabricated sensor.