[17a-K501-1~8] 6.3 Oxide electronics

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[17a-K501-5] Single-crystalline anatase Nb-doped TiO₂ membrane exhibiting high electrical conduction and transparency

〇Yuzuki Uchida¹, Jiyang Huang¹, Masamichi Negishi¹, Seung Sae Hong², Tomoteru Fukumura^1,3,4 (1.Tohoku Univ., 2.UC Davis, 3.WPI-AIMR, Tohoku Univ., 4.CSIS, Tohoku Univ.)

Keywords:

Nb-doped titanium dioxide,transparent conducting oxide,sacrificial layer

In recent years, the fabrication of single-crystalline oxide membranes using sacrificial layers has attracted significant attention. If single-crystalline membranes of transparent conducting oxides can be realized, they hold great potential for applications in flexible devices. In this study, we report the successful fabrication of highly conductive Nb-doped TiO₂ single-crystalline membranes with reduced crack formation by employing an acid-soluble La_0.7Sr_0.3MnO₃ sacrificial layer.