[17a-K504-1~6] 6.4 Thin films and New materials

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[17a-K504-2] Study of hydrophilicity of SiO₂-TiO₂mixed film deposited by combination deposition method

〇Koshiro Sasaki¹, Hiroshi Murotani¹, Takayuki Matsudaira² (1.Grad. School of Eng., Tokai Univ., 2.Shincron Co., Ltd)

Keywords:

Optical thin film,Hydrophilic

We have developed a combination deposition method in which EB deposition and DC pulse sputtering are operated simultaneously in the same vacuum chamber. SiO₂ thin films deposited by this method have been shown to have a low refractive index and long-term hydrophilicity, but it is difficult to restore the hydrophilicity once it has deteriorated. Therefore, by depositing a mixed film with TiO₂, which has superhydrophilicity due to photocatalysis, it is expected to produce a thin film that combines the properties of both materials. In this study, the hydrophilicity of SiO₂-TiO₂ mixed films prepared by a combination deposition method was investigated.