[17a-K506-1~11] 3.6 Laser processing

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[17a-K506-4] Effect of Internal Defect Formation in Silica Glass on Ablation Efficiency in Ultrashort-Pulsed Intensity-Modulated Laser Processing

〇Dai Yoshitomi¹, Hiroshi Ogawa¹, Hideyuki Takada¹, Yohei Kobayashi², Aiko Narazaki¹ (1.AIST, 2.ISSP Univ. Tokyo)

Keywords:

laser processing,silica,defect

In ultrashort pulse laser processing of silica glass, when applying ramp modulation to temporally increase or decrease the pulse intensity, the ablation efficiency for the downward ramp proved to be significantly higher than that for the upward ramp. The dependencies on repetition rates revealed that persistent effects play a major role, and PL microscopy measurements indicated that the formation of internal defects is involved.