[17a-K507-1~5] 7.1 X-ray technologies

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-K507-2] XPS background modeling by recursive energy partition Shirley method

〇Sanghun Cho¹, Zeyuan Ni¹ (1.Tokyo Electron Ltd.)

Keywords:

XPS,Spectral analysis,Background