[17p-K303-1~8] 8.1 Plasma production and diagnostics

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[17p-K303-6] Analysis of Ar Ion Beam Profiles by Machine Learning

〇Dohan Kim¹, Shunya Kawamura¹, Masayoshi Naito¹, Haruka Suzuki¹, Daiki Iino², Fukumizu Hiroyuki², Kazuaki Kurihara², Hirotaka Toyoda¹ (1.Nagoya Univ., 2.KIOXIA Corp.)

Keywords:

Ion angular distribution