The 72nd JSAP Spring Meeting 2025
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Presentation Information

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[17p-K303-6]Analysis of Ar Ion Beam Profiles by Machine Learning

〇Dohan Kim1, Shunya Kawamura1, Masayoshi Naito1, Haruka Suzuki1, Daiki Iino2, Fukumizu Hiroyuki2, Kazuaki Kurihara2, Hirotaka Toyoda1 (1.Nagoya Univ., 2.KIOXIA Corp.)

Keywords:

Ion angular distribution

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