[17p-K505-1~13] 23.1 Joint Session N "Informatics"

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[17p-K505-12] Non-rigid Registration of 3D Atom Probe and Transmission Electron Microscopy Data

〇Zentaro Akase¹, Yoshito Otake¹, Jun Uzuhashi², Kazunori Iwamitsu¹, Jun Yamasaki³, Tadakatsu Ohkubo², Shigetaka Tomiya¹ (1.NAIST, 2.NIMS, 3.Osaka Univ.)

Keywords:

3D atom probe tomography,Transmission electron microscopy,Non-rigid registration

As semiconductor device performance advances, accurately understanding the three-dimensional distribution of trace impurities has become increasingly critical. We are developing a highly sensitive and high-resolution analytical method that employs non-rigid registration technology to combine 3DAP data and electron tomography data, which have different modalities. In this presentation, we will showcase examples of precise alignment achieved in two-dimensional simulated and actual data using B-spline deformation fields for distortion correction and CMA-ES for optimization.