The 72nd JSAP Spring Meeting 2025
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Oral presentation8 Plasma Electronics : 8.7 Plasma Electronics Invited Talk

[15a-K102-1~1]8.7 Plasma Electronics Invited Talk

Sat. Mar 15, 2025 10:30 AM - 11:45 AM JST
Sat. Mar 15, 2025 1:30 AM - 2:45 AM UTC
K102 (Lecture Hall Bldg.)
Kazunori Koga(Kyushu Univ.)
10:30 AM - 11:45 AM JST(1:30 AM - 2:45 AM UTC)

[15a-K102-1][INVITED] A Review of the Last 30 Years of Research on High Aspect Ratio Hole Etching

〇Kazuaki Kurihara1 (1.Frontier Tech. R&D Inst. KIOXIA Corp.)
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