Oral presentation
Thu. Sep 10, 2026 9:00 AM - 11:00 AM JST
Thu. Sep 10, 2026 12:00 AM - 2:00 AM UTC
F211 (Frontier Rsch. in Applied Sci. Bld.)
Chair : Yuuichiro Mitani(Tokyo City University)
Oxidation mechanisms and characteristic analysis of Silicon oxide and Silicon nitride films
Oral presentation
Fri. Sep 11, 2026 9:00 AM - 11:00 AM JST
Fri. Sep 11, 2026 12:00 AM - 2:00 AM UTC
E201 (First Year Education Bld. E Block)
Chair : Keisuke Yamamoto(Kumamoto Univ.)
Gate stacks using Ge and Oxide Semiconductor substrates and High-k dielectric films