[15a-M_124-1~13] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[15a-M_124-8] Characterization of Cryogenic GeOI FinFET CMOS

〇WENHSIN CHANG¹, X. R. YU², Y. J. LEE^3,4, Y. H. WANG², T. MAEDA¹ (1.AIST, 2.NCKU, 3.TSRI, 4.NYCU)

Keywords:

Ge,CMOS,FinFET