[15a-PB1-1~9] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[15a-PB1-4] Prediction of Anisotropic Size Effect on Electrical Resistivity in Single-Crystalline Molybdenum Nanostructures

〇Takashi Kurusu¹, Hiroyoshi Tanimoto¹, Kazuya Ohuchi¹ (1.KIOXIA)

Keywords:

single-crystalline metallic interconnect,size effect on electrical resistivity,anisotropy