Presentation Information

[15a-W2_401-1]Device Structural Study of a Vertical BGaN Neutron Detector for Flip-Chip processing.

〇Sotaro Takenaka1, Ryohei Kudo1, Kosuke Ando1, Yura Maeda1, Eito Kokubo2, Katsuyuki Takagi3, Genichiro Wakabayashi4, Tatsuro Oda5, Masahiro Hino6, Yoshio Honda7, Hiroshi Amano7, Yoku Inoue1, Toru Aoki3, Takayuki Nakano1,3 (1.Shizuoka Univ., 2.Nagoya Univ., 3.R.I.E. Shizuoka Univ., 4.Kindai Univ., 5.ISSP. Univ. of Tokyo, 6.KURNS Kyoto Univ., 7.IMaSS. Nagoya Univ.)

Keywords:

BGaN,neutron detector,semiconductor