Presentation Information

[15a-W2_402-4]Mechanism of SiC thin film formation by Si surface carbonization using CO gas

〇Tsubasa Hattori1, Masayoshi Adachi2, Hiroyuki Fukuyama2, Momoko Deura1 (1.Waseda Univ., 2.IMRAM, Tohoku Univ.)

Keywords:

SiC,surface carbonization