Presentation Information
[15a-W2_402-4]Mechanism of SiC thin film formation by Si surface carbonization using CO gas
〇Tsubasa Hattori1, Masayoshi Adachi2, Hiroyuki Fukuyama2, Momoko Deura1 (1.Waseda Univ., 2.IMRAM, Tohoku Univ.)
Keywords:
SiC,surface carbonization
