[15a-W8E_101-1~8] 13.3 Insulator technology

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[15a-W8E_101-1] Effect of oxidation temperature on Ti/Ge structures formed by EB evaporation

Kazuo Sunahata¹, Kaito Nakao¹, Takeshi Miyairi¹, Tetsuya Sato², 〇Yohei Otani¹ (1.Suwa Univ. of Sci., 2.Univ. of Yamanashi)

Keywords:

Ge,TiO2