[15a-W8E_101-1~8] 13.3 Insulator technology

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[15a-W8E_101-8] Changes in dipole effects of ALD-La₂O₃ and ALD-Al₂O₃ using PDA

〇Toshihide Nabatame^1,2, Tomomi Sawada^1,2, Hiromi Miura^1,2, Manami Miyamoto^1,2, Takashi Onaya^1,2, Kazuhito Tsukagoshi^1,2, Naoki Fukata^1,2, Wipakorn Jevasuwan^1,2, Shinji Migita^2,3 (1.NIMS, 2.LSTC, 3.AIST)

Keywords:

dipole,ALD-Al2O3,ALD-La2O3

In this paper, we report change in dipole effects of ALD-La₂O₃ and Al₂O₃ from V_fb shift by PDA temperature.