[15p-70A_101-1~13] Atomic Layer Process (ALP) analysis and application technologies (3)

2:00 PM - 2:30 PM JST(5:00 AM - 5:30 AM UTC)

[15p-70A_101-3] Atomic-Layer Process: Essential for 3D-Nano-Devices in Advanced LSIs

〇Hitoshi Wakabayashi¹ (1.Science Tokyo)

Keywords:

3D-Nano-Devices,Atomic-Layer Process

Atomic-Layer Process: Essential for 3D-Nano-Devices in Advanced LSIs