[15p-70A_101-1~13] Atomic Layer Process (ALP) analysis and application technologies (3)

3:15 PM - 3:45 PM JST(6:15 AM - 6:45 AM UTC)

[15p-70A_101-5] Atomic Scale Processing for Quantum Applications

〇Shohei Ito¹, ChunTing Shen¹, Nick Chittock² (1.OIKK, 2.OIPT)

Keywords:

Atomic Layer Deposition,Atomic Layer Etching,Quantum Technology

With the increasing technological readiness of quantum technology the field has to start focussing on scalable fabrication methods for qubits and quantum circuits. This contribution will focus on the enabling role atomic scale processing (ASP) methods such as atomic layer deposition (ALD) and atomic layer etching (ALE) could play in scaling of Quantum Technology.