Presentation Information
[15p-S4_203-15]RTA Crystallization of InSb Films on Polyimide Deposited by RF Sputtering Using Ne
〇Tatsushi Higa1, Shuhei Shimizu1, Takashi Noguchi1, Takashi Kajiwara2, Taizoh Sadoh2, Tetsuo Okuyama3, Toshiyuki Tsuchiya3, Shinichi Taniguchi4, Shokichi Yoshitome4, Tatsuya Okada1 (1.Univ. Ryukyus, 2.KyuShu Univ., 3.Toyobo Co., LTD, 4.e-tec Co., LTD)
Keywords:
indium antimonide,Hall Mobility,RTA Crystallization
