Presentation Information

[15p-S4_203-8]Enhancing electron mobility of InZnOx channel thin-film-transistors by FLA

〇Yuma Ueno1, Li-Chi Peng2, Tsung-Te Chou3, Edward Yi Chang2, Chun-Hsiung Lin2, Kenji Inoue1, Katsuhiro Mitsuda1, Shinichi Kato1 (1.SCREEN SPE, 2.NYCU, 3.NCIR)

Keywords:

flash lamp annealing,FLA,Crystallization