[15p-SL_101-1~17] CS.4 Code-sharing Session of 6.1 & 15.4

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[15p-SL_101-13] Fabrication and characterization of ScAlN/AlN/GaN heterostructures

〇Sawaki Sato¹, Kazuhisa Ikeda¹, Takuya Maeda², Hiroshi Funakubo³, Atsushi Kobayashi¹ (1.Tokyo Univ. of Science, 2.The Univ. of Tokyo, 3.Institute of Science Tokyo)

Keywords:

ferroelectric materials,epitaxial growth,sputtering