Presentation Information

[15p-SL_101-2]Structural and electrical characterization of NbAlN/AlGaN/AlN/GaN heterostructures

〇Tomoya Okuda1, Souta Kurogi2, Yusuke Wakamoto3, Takuya Maeda3, Kazuhisa Ikeda1,2, Atsushi Kobayashi1,2 (1.Tokyo Univ. of Science, 2.Tokyo Univ. of Science graduate school, 3.The Univ. of Tokyo graduate school)

Keywords:

NbAlN,GaN,HEMT