Presentation Information

[15p-SL_101-6]Growth and characterization of AlYN layers grown by MOCVD

〇Shun Narita1, Yudai Shimizu1, Daisuke Iida1, Keitaro Ikejiri1, Kazutada Ikenaga1 (1.Taiyo Nippon Sanso Corporation)

Keywords:

MOCVD,AlYN