[15p-SL_101-1~17] CS.4 Code-sharing Session of 6.1 & 15.4

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[15p-SL_101-8] Epitaxial Growth of NbAlN Films on GaN by Sputtering

〇Souta Kurogi¹, Riku Kikuchi², Takahiro Kawamura³, Kazuhisa Ikeda^1,2, Atsushi Kobayashi^1,2 (1.Tokyo Univ. of Science, 2.Grad. School of Tokyo Univ. of Science, 3.Mie Univ.)

Keywords:

NbAlN,GaN,Epitaxy