[15p-W2_402-1~12] 15.5 Group IV crystals and alloys

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[15p-W2_402-11] Strain Distribution of Local SiGe Virtual Substrate for Self-Ordered Nanodot Fabrication

〇(D)Jongeun Baek^1,2, Wei-Chen Wen², Jon Schlipf², Andreas Mai², Katsunori Makihara^1,2, Yuji Yamamoto^1,2 (1.Nagoya Univ., 2.IHP)

Keywords:

virtual substrate,strain distribution,nanodot