[15p-W2_402-1~12] 15.5 IV族結晶，IV-IV族混晶

16:15 〜 16:30

[15p-W2_402-11] Strain Distribution of Local SiGe Virtual Substrate for Self-Ordered Nanodot Fabrication

〇(D)Jongeun Baek^1,2, Wei-Chen Wen², Jon Schlipf², Andreas Mai², Katsunori Makihara^1,2, Yuji Yamamoto^1,2 (1.Nagoya Univ., 2.IHP)

キーワード：

virtual substrate、strain distribution、nanodot