[15p-W8E_101-1~13] 13.3 Insulator technology

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[15p-W8E_101-12] Decomposition of angle-selected STEM-EELS maps by NMF analysis: application to bandgap measurement of Al₂O₃ ultrathin layer within heterogeneous

〇Takanori Asano¹, Manabu Tezura¹, Hiroki Tanaka¹ (1.Kioxia corp.)

Keywords:

STEM-EELS,Bandgap,Al2O3