Presentation Information
[15p-W8E_101-6]Fabrication of SiO2/Si Structures by Solution Oxidation Using Sulfuric Acid
〇Shouhei Onizuka1, Hoshiki Harata1, Tomo Ueno1, Yoshitaka Iwazaki1 (1.Noko Univ.)
Keywords:
chemical solution oxidation method
chemical solution oxidation method