Presentation Information

[15p-W8E_101-6]Fabrication of SiO2/Si Structures by Solution Oxidation Using Sulfuric Acid

〇Shouhei Onizuka1, Hoshiki Harata1, Tomo Ueno1, Yoshitaka Iwazaki1 (1.Noko Univ.)

Keywords:

chemical solution oxidation method