[15p-W9_324-1~14] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[15p-W9_324-11] Sheet resistance measurement of wide bandgap semiconductor layers using microwaves

Hikaru Ikeda¹, Takeru Wakamatsu¹, Yuki Isobe¹, Katsuhisa Tanaka¹, 〇Shizuo Fujita¹, Hideo Sugaya² (1.Kyoto Univ., 2.Panasonic)

Keywords:

wide bandgap semiconductors,epitaxial layer,sheet resistance

As non-destructive methods for determining the sheet resistance (or resistivity) of semiconductor thin films grown on semi-insulating substrates, the four-probe method and eddy current method are representative. However, their application to wide-bandgap semiconductors and small-area samples is often difficult. We have investigated a method for determining sheet resistance from impedance measurements in the microwave region and report its outline and results.