Presentation Information
[15p-W9_324-7]Halide vapor phase epitaxy of c-plane α-Ga2O3 on an α-Cr2O3 template
〇Yuichi Oshima1, Takayoshi Oshima1, Shiyu Xiao2, Kazuto Murakami2, Katsuhiro Imai2, Takahiro Tomita2 (1.NIMS, 2.NGK INSULATORS, LTD)
Keywords:
Gallium oxide,HVPE,Cr2O3
