Presentation Information

[15p-W9_324-7]Halide vapor phase epitaxy of c-plane α-Ga2O3 on an α-Cr2O3 template

〇Yuichi Oshima1, Takayoshi Oshima1, Shiyu Xiao2, Kazuto Murakami2, Katsuhiro Imai2, Takahiro Tomita2 (1.NIMS, 2.NGK INSULATORS, LTD)

Keywords:

Gallium oxide,HVPE,Cr2O3