Presentation Information
[16a-PA4-1]4-terminal vertical poly-Si TFTs on glass substrates using ALD-Al2O3
〇Haku Iwadate1, Takuya Nakazawa1, Akito Kurihara1, Akito Hara1 (1.Tohoku Gakuin Univ.)
Keywords:
semiconductor,TFT,vertical
semiconductor,TFT,vertical