Presentation Information

[16a-PA4-1]4-terminal vertical poly-Si TFTs on glass substrates using ALD-Al2O3

〇Haku Iwadate1, Takuya Nakazawa1, Akito Kurihara1, Akito Hara1 (1.Tohoku Gakuin Univ.)

Keywords:

semiconductor,TFT,vertical