The 73rd JSAP Spring Meeting 2026
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Poster presentation13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16a-PA4-1~2]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Mon. Mar 16, 2026 9:30 AM - 11:00 AM JST
Mon. Mar 16, 2026 12:30 AM - 2:00 AM UTC
PA4 (Arena (1F))

[16a-PA4-1]4-terminal vertical poly-Si TFTs on glass substrates using ALD-Al2O3

〇Haku Iwadate1, Takuya Nakazawa1, Akito Kurihara1, Akito Hara1 (1.Tohoku Gakuin Univ.)

[16a-PA4-2]Performance enhancement of unannealed amorphous IGZO TFTs via post-UV irradiation resting

〇(M1)Koga Nakamura1, Kazuho Ishi1, Kou Ishihara1, Shinya Aikawa1 (1.Kogakuin Univ.)
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