Presentation Information
[16a-PA4-2]Performance enhancement of unannealed amorphous IGZO TFTs via post-UV irradiation resting
〇(M1)Koga Nakamura1, Kazuho Ishi1, Kou Ishihara1, Shinya Aikawa1 (1.Kogakuin Univ.)
Keywords:
IGZO,TFT,UV
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