Presentation Information

[16a-PA4-2]Performance enhancement of unannealed amorphous IGZO TFTs via post-UV irradiation resting

〇(M1)Koga Nakamura1, Kazuho Ishi1, Kou Ishihara1, Shinya Aikawa1 (1.Kogakuin Univ.)

Keywords:

IGZO,TFT,UV