[16a-S2_203-1~9] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[16a-S2_203-3] [The 17th Silicon Technology Division Young Researcher Award] Intra-Grain Defect Formation via Discontinuous Solid-Phase Epitaxy

〇Manabu Tezura¹, Takanori Asano¹, Riichiro Takaishi¹, Mitsuhiro Tomita¹, Masumi Saitoh¹, Hiroki Tanaka¹ (1.Frontier Technology R&D Inst.)

Keywords:

crystal growth,TEM,in situ