[16a-S4_203-1~12] 7.2 Applications and technologies of electron beams

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[16a-S4_203-1] Classification of SE and BE in SEM observation

〇Takashi Sekiguchi¹, Yuanzhao Yao¹ (1.Univ. Tsukuba)

Keywords:

SEM,SE,BE

We propose a new classification method for SEM imaging, which adds energy and emission angle information to conventional SE and BE detection. The energy ranges are categorized into three levels: from 0 to 100 V for SE and from E_P (primary electron energy) to 1keV for BE with A, B, and C. For emission angles, 1, 2, and 3 are assigned to 0°to 90° from the zenith. Furthermore, 'd' (directional) or 'o' (omnidirectional) is added based on the detector orientation. This nomenclature clarifies the physical information contained in SE and BE images.