[16a-S4_203-1~12] 7.2 Applications and technologies of electron beams

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[16a-S4_203-3] Acquisition and Evaluation of Angle-resolved SEM Images Using a Dodecahedron SE/BSE Detector

〇Yuto Yanagihara¹, Kazuhiro Kumagai^2,3, Yuanzhao Yao², Takashi Sekiguchi² (1.GPI, 2.Univ. of Tsukuba, 3.AIST)

Keywords:

microchannel plate,SEM,detector

We prototyped a dodecahedral detector incorporating MCPs (Microchannel Plates) and attempted to acquire secondary electrons (SE) and backscattered electrons (BSE) in a scanning electron microscope (SEM). MCPs with grids for high-pass filtering were placed on each face of the dodecahedral frame, enabling signals corresponding to lateral emission angles. By switching the grid potential, SE and BSE can be selectively detected. The detector was installed on a field-emission SEM (SU7000, Hitachi High-Tech) for experiments. This presentation shows three application examples: (1) multi-directional SE/BSE imaging for surface roughness evaluation, (2) observation of a two-layer metal to assess compositional contrast differences by detector position, and (3) BSE imaging for three-dimensional shape evaluation. Comparison of images from each detection face demonstrates that combining BSE with detection direction provides angle-dependent image information not obtainable with conventional detectors.