[16a-S4_203-1~12] 7.2 Applications and technologies of electron beams

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[16a-S4_203-8] Asymmetric Electron Beam Profile Estimation in Scanning Electron Microscopy

〇Yasunari Sohda¹, Michiru Tanaka¹ (1.Univ. of Tsukuba)

Keywords:

Scanning Electron Microscope,Electron Beam,Electron Beam Profile

We have been investigating methods to estimate the electron beam size in scanning electron microscope based on image sharpness. In this study, to evaluate the asymmetric profile of the electron beam, we assumed the electron beam shape to be composed of two Voigt functions. As a result, the fitting accuracy of pattern edge profiles in SEM images improved. Optical axis experiments utilizing this method suggested the presence of coma aberration.