Presentation Information
[16a-W2_401-3]Relationship between AlN Composition Gradient in the GaN Channel and Leakage Current in N-Polar GaN HEMT Structures
〇(DC)Aina Hiyama Zazuli1, Ryosuke Ninoki1, Fumiya Yamanaka1, Taisei Kimoto1, Haruki Danbata1, Nobuteru Hirata1, Amane Hayashiuchi1, Yuuya Kitamura1, Kei Sunai1, Rinne Abe1, Haruka Tokumoto1, Satoshi Kurai1, Narihito Okada1, Yoichi Yamada1 (1.Grad. School of Sci. & Tech. for Innovation, Yamaguchi Univ.)
Keywords:
MOVPE,N-polar GaN,HEMT
