[16a-W2_401-1~9] 15.4 III-V-group nitride crystals

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[16a-W2_401-6] Growth of AlGaN using MOVPE-AlN Template on Sputtered AlN

〇(M2)Yuto Matsubara¹, Koki Fujii¹, Yusuke Takayanagi¹, Yukiya Hayashi¹, Soki Shimizu¹, Yuki Kuwahara¹, Kota Matsuo¹, Yuusuke Takashima^1,2, Yoshiki Naoi^1,2, Ibuki Taniuchi⁴, Shohei Nakamura⁴, Atsushi Maeoka⁴, Atsushi Osawa⁴, Shigeru Takatsuji⁴, Takahiro Kimura⁴, Kentaro Nagamatsu^1,2,3 (1.Faculty of Science and Engineering, Tokushima Univ., 2.pLED, Tokushima Univ., 3.IPHF, Tokushima Univ., 4.SCREEN Holdings Co., Ltd.)

Keywords:

AlGaN