[16a-W2_401-1~9] 15.4 III-V-group nitride crystals

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[16a-W2_401-9] In situ sputtered metal contacts on pulsed-sputtered n-type AlGaN

〇Aiko Naito¹, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS, Utokyo)

Keywords:

ohmic contact,AlGaN,in-situ