Presentation Information
[16a-W8E_307-10]Measurement of carbon concentration in silicon crystal/ Renaissance (32) It is impossible to measure by photoluminescence
〇Naohisa Inoue1, Shuichi Okuda1, Shuichi Kawamata1 (1.Osaka Metropolitan Univ. Radiation Research Center)
Keywords:
silicon crystal,carbon concentration,optical characterization
(1)When PL study started, it was pointed out to neglect complicated luminescence processes. Normalization by exciton emission is not valid.
(2)It utilizes CiCs pair introduced by electron irradiation. More than 20 complexes are formed and destroyed, all of which have higher concentration than CiCs. CiCs is uncontrollable.
(3)CiCs concentration changes with O and B concentration. [O] and [B] must be measured and many samples must be excluded.
(4)Only MCZ samples with narrow [O] range is allowed.
(5)CZ and FZ samples are not allowed. Most of commercial wafers are excluded.
(6)Not only total electron flux but current and time must be strictly fixed. There is no description in papers and the “Standard.” It is impossible to do it.
(7)Electron acceleration voltage must be strictly controlled. They said, 1 and 2 MeV are OK.
(8)±20% error is always expected and accepted.
(9)Electron accelerator is placed in the room with poor control.
(10)Results at different temperatures are mixed.
(2)It utilizes CiCs pair introduced by electron irradiation. More than 20 complexes are formed and destroyed, all of which have higher concentration than CiCs. CiCs is uncontrollable.
(3)CiCs concentration changes with O and B concentration. [O] and [B] must be measured and many samples must be excluded.
(4)Only MCZ samples with narrow [O] range is allowed.
(5)CZ and FZ samples are not allowed. Most of commercial wafers are excluded.
(6)Not only total electron flux but current and time must be strictly fixed. There is no description in papers and the “Standard.” It is impossible to do it.
(7)Electron acceleration voltage must be strictly controlled. They said, 1 and 2 MeV are OK.
(8)±20% error is always expected and accepted.
(9)Electron accelerator is placed in the room with poor control.
(10)Results at different temperatures are mixed.