[16a-W8E_307-1~10] 15.7 Crystal characterization, impurities and crystal defects

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[16a-W8E_307-6] Development of large area X-ray rocking curve mapping technique

〇Kotaro Ishiji¹, Shigeru Ishida², Shin-ichiro Kokubu², Takashi Fujii³, Tsuyoshi Kumagai³, Tsuguo Fukuda³, Keisuke Seo⁴, Shunta Harada⁴ (1.SAGA-LS, 2.SES, 3.Fukuda Cryst. Lab., 4.Nagoya Univ.)

Keywords:

X-ray rocking curve mapping,crystal strain structure,lattice warpage structure

We introduce a novel large-area X-ray rocking curve mapping technique that utilizes the wide beam of BL09 at the SAGA-LS synchrotron facility and the pixels of the imaging detector. The resolution is 50 um and the field view is 50x50 mm2, and a mapping image of a 2-inch wafer can be collected in 30 minutes. Two types of the structures, the crystal strain distribution and lattice warpage distribution, were obtained by this technique, and the obtained distributions were found to correlate with the crystal defect structure. This technique is expected to contribute to improving crystal quality.