[16p-PA3-1~11] 15.4 III-V-group nitride crystals

[16p-PA3-1] Crystallographic Tilt and Twist in AlGaN/AlN/Sapphire Heteroepitaxy

〇Koki Fujii¹, Yuto Matsubara¹, Yusuke Takayanagi¹, Yuusuke Takashima^1,2, Yoshiki Naoi^1,2, Kentaro Nagamatsu^1,2,3 (1.G. S. Sci. Tech. Innovation, Tokushima Univ., 2.pLED, Tokushima Univ., 3.IPHF, Tokushima Univ.)

Keywords:

Crystal Growth,MOVPE,AlGaN