[16p-PA4-1~10] 15.5 Group IV crystals and alloys

[16p-PA4-9] Evaluation of strain distribution in strained SiGe/Ge-on-Si(111)

〇Keitaro Kato¹, Ryota Mizoguchi¹, Yuki Nagao¹, Tomohiro Hagiwara¹, Shugo Ishibashi¹, Mayu Aikawa¹, Mithihiro Yamada¹, Kohei Hamaya^2,3, Kentarou Sawano¹ (1.Tokyo City Univ., 2.CSRN, The Univ. of Osaka., 3.OTRI-Spin, The Univ. of Osaka.)

Keywords:

SiGe