Presentation Information

[16p-PA7-27]Characterization of TaOx Thin Films Formed by Solution-Processed TaS2

〇Sora Kawai1, Ayane Nomi2, Kota Arai2, Mitsuru Inada2, Shingo Sato2, Tomokazu Takahashi2, Seiji Aoyagi2, Keiji Ueno3, Mahito Yamamoto2 (1.Kansai Univ., 2.Grad. Sch. Kansai Univ., 3.Saitama Univ.)

Keywords:

High-k oxide,Solution process,TaS2