[16p-PB2-1~15] 6.6 Probe Microscopy

[16p-PB2-3] STM observation of internal structure of TiO₂ using field evaporation in Atom Probe Tomography

〇(M1)Shun Harada¹, Shu Kurokawa¹, Koji Inoue² (1.Kyoto Univ., 2.Tohoku Univ. IMR)

Keywords:

Scanning Tunneling Microscope,Atom Probe Tomography

We are developing a versatile method for observing internal material structures by combining surface flattening via Atom Probe Tomography (APT) field evaporation with Scanning Tunneling Microscopy (STM). In this study, a titanium dioxide (TiO₂) single crystal was used as a model specimen. Following surface cleaning using Focused Ion Beam (FIB) milling and field evaporation, the sample was transferred under vacuum for room-temperature STM observation. The results confirmed Ångström-scale surface topography. Future work will focus on achieving higher resolution through cryogenic observation and establishing the geometric correlation with APT 3D reconstructions.