[16p-S4_203-1~9] 7.2 Applications and technologies of electron beams

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[16p-S4_203-1] Analysis of Aberration Characteristics during Electron Source Tilting using the Boundary Charge Method

〇Yasunari Sohda¹, Ippo Kishida¹, Hidekazu Murata² (1.Univ. of Tsukuba, 2.Meijo Univ.)

Keywords:

Scanning Electron Microscope,Aberration,Boundary Charge Method

The aberration characteristics when tilting the electron source in a scanning electron microscope were analyzed using the boundary charge method. The results indicated that tilting induces new coma and astigmatism aberrations. The coma aberration causes the asymmetry shape in the virtual electron source during tilting. These aberrations are thought to originate from the lensing effect caused by the electron extraction electrode.