[16p-S4_203-1~9] 7.2 Applications and technologies of electron beams

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16p-S4_203-2] Angular current density dependence of virtual source size in Schottky electron source.

〇(M1)Yuki Hayashida¹, Soichiro Matsunaga^1,2,3, Yoichi Yamada¹ (1.Tsukuba Univ., 2.Hitachi, Ltd., 3.Hitachi High-Tech)

Keywords:

electron beam,brightness,Schottky electron sources

High-performance scanning electron microscopes (SEMs) require electron sources capable of delivering high beam currents. However, under high-current operation, Coulomb (space-charge) effects cause the virtual source size to increase, leading to saturation and degradation of brightness. Despite its importance, this effect has rarely been quantified experimentally. In this presentation, we systematically vary the angular current density of a Schottky electron source and measure the resulting changes in virtual source size and brightness to quantitatively evaluate the impact of Coulomb effects.